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Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

フォーマット:
図書
責任表示:
editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
言語:
英語
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1988
形態:
xv, 509 p. : ill. ; 24 cm
著者名:
シリーズ名:
Materials Research Society symposia proceedings ; v. 101 <BA00013775>
書誌ID:
BA05021227
ISBN:
9780931837692 [0931837693]  CiNii Books  Webcat Plus  Google Books
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