著者典拠情報

標目形：
Ehrlich, Daniel J.
属性：
Personal
注記：
Laser-controlled chemical processing of surfaces, c1984: CIP t.p. (Daniel J. Ehrlich; Mass. Inst. of Tech.-Lincoln Laboratory, Lexington, Mass.)
著者典拠ID：
DA01101670


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1.

図書
図書
1. Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
出版情報: Pittsburgh, Pa. : Materials Research Society, c1988
シリーズ名: Materials Research Society symposia proceedings ; v. 101
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2.

図書
図書
2. Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.
editors, A. Wayne Johnson, Daniel J. Ehrlich, Howard R. Schlossberg
出版情報: New York : North-Holland, c1984
シリーズ名: Materials Research Society symposium proceedings ; v. 29
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