著者典拠情報

標目形：
Kahn, Harold
属性：
Personal
注記：
Case Weatern reserve Univ.
SRC:Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. / editors, Harold Kahn ... [et al.](Materials Research Society, c2001)
著者典拠ID：
DA13344498


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1.

図書
図書
1. Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
editors, Arturo A. Ayón ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society, c2002
シリーズ名: Materials Research Society symposium proceedings ; v. 687
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2.

図書
図書
2. Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
editors, Harold Kahn ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society, c2001
シリーズ名: Materials Research Society symposium proceedings ; v. 657
所蔵情報: loading…