Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.
- フォーマット:
- 図書
- 責任表示:
- editors, Avishay Katz ... [et al.]
- 言語:
- 英語
- 出版情報:
- Pittsburgh, Pa. : Materials Research Society, c1992
- 形態:
- xvii, 965 p. : ill. ; 24 cm
- 著者名:
- Katz, Avishay <DA05347504>
- シリーズ名:
- Materials Research Society symposium proceedings ; v. 260 <BA00013775>
- 書誌ID:
- BA19373517
- ISBN:
- 9781558991552 [1558991557]
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