著者典拠情報

標目形：
Murarka, S. P.
属性：
Personal
から見よ参照形：
Murarka, Shyam P.
注記：
His Silicides for VLSI applications, 1982: CIP t.p. (S.P. Murarka, Bell Lab., Murray Hill, NJ)
His Electronic materials, c1989: CIP t.p. (Shyam P. Murarka, Rensselaer Polytech. Inst., Troy, N.Y.)
著者典拠ID：
DA03701420


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1.

図書
図書
1. Chemical mechanical planarization of microelectronic materials
[by] Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
出版情報: New York : J.Wiley, c1997
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2.

図書
図書
2. Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
editors, S.P. Murarka ... [et al.]
出版情報: Pittsburgh, Pa. : Materials Research Society, c1994
シリーズ名: Materials Research Society symposium proceedings ; v. 337
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3.

図書
図書
3. Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
editors, S.P. Murarka ... [et al.]
出版情報: Pittsburgh : Materials Research Society, c1994
シリーズ名: Materials Research Society symposium proceedings ; v. 318
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4.

図書
図書
4. Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
editors, Avishay Katz, Shyam P. Murarka, Ami Appelbaum
出版情報: Pittsburgh, Pa. : Materials Research Society, c1990
シリーズ名: Materials Research Society symposium proceedings ; v. 181
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5.

図書
図書
5. Electronic materials : science and technology
Shyam P. Murarka, Martin C. Peckerar
出版情報: Boston : Academic Press, c1989
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