Materials and processes for microelectronic systems

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Materials and processes for microelectronic systems

フォーマット:

図書

責任表示:

edited by K.M. Nair, R. Pohanka, R.C. Buchanan

言語:

英語

出版情報:

Westerville, Ohio : American Ceramic Society, c1990

形態:

viii, 733 p. ; 24 cm

著者名:

シリーズ名:

Ceramic transactions ; v. 15 <BA06690812>

書誌ID:

BA11479536

ISBN:

9780944904312 [0944904319]

子書誌情報

所蔵情報

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詳細

主題:	Ceramic materials--Congresses; Integrated circuits--Design and construction--Congresses; Microelectronics--Materials--Congresses
分類・件名:	LCC : TK7874 DDC : 621.381 LCSH : Microelectronics -- Materials -- Congresses LCSH : Integrated circuits -- Design and construction -- Congresses LCSH : Ceramic materials -- Congresses
LCCN:	90001219
注記:	"Proceedings of the Symposium on Materials and Processes for Microelectronic Systems held during the First International Ceramic Science and Technology Congress held in Anaheim, CA, on October 31-November 3, 1989"--T.p. verso Includes index
TTLL:	eng

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