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Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.

フォーマット:
図書
責任表示:
editors, Srikar Vengallatone ... [et al.]
言語:
英語
出版情報:
Warrendale, Pa. : Materials Research Society, c2009
形態:
xi, 247 p. : ill. ; 24 cm
著者名:
シリーズ名:
Materials Research Society symposium proceedings ; v. 1139 <BA00013775>
書誌ID:
BB02089094
ISBN:
9781605111117 [1605111112]  CiNii Books  Webcat Plus  Google Books
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