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1.

図書
図書
1. Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA
editors, Michael Liehr ... [et al.]
出版情報: Pittsburgh, PA : Materials Research Society, 1995
シリーズ名: Materials Research Society symposium proceedings ; vol. 386
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2.

図書
図書
2. Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess
出版情報: Pittsburgh, Pa. : Materials Research Society, c1990
シリーズ名: Materials Research Society symposium proceedings ; v. 165
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3.

図書
図書
3. Materials and processes for microelectronic systems
edited by K.M. Nair, R. Pohanka, R.C. Buchanan
出版情報: Westerville, Ohio : American Ceramic Society, c1990
シリーズ名: Ceramic transactions ; v. 15
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4.

図書
図書
4. Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
出版情報: Pittsburgh, Pa. : Materials Research Society, c1988
シリーズ名: Materials Research Society symposia proceedings ; v. 101
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