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1.

図書
図書
1. Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.
editors, Srikar Vengallatone ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society, c2009
シリーズ名: Materials Research Society symposium proceedings ; v. 1139
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2.

図書
図書
2. Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
editors, David A. LaVan ... [et al.]
出版情報: Warrendale : Materials Research Society, c2008
シリーズ名: Materials Research Society symposium proceedings ; v. 1052
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3.

図書
図書
3. Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
editors, Arturo A. Ayón ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society, c2002
シリーズ名: Materials Research Society symposium proceedings ; v. 687
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