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1.

図書
図書
1. Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
editors, Gregg S. Higashi ... [et al.]
出版情報: Pittsburgh, Pa. : Materials Research Society, c1997
シリーズ名: Materials Research Society symposium proceedings ; v. 477
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2.

図書
図書
2. Surface chemical cleaning and passivation for semiconductor processing
editors, Gregg S. Higashi, Eugene A. Irene, Tadahiro Ohmi
出版情報: Pittsburgh, PA : Materials Research Society, 1993
シリーズ名: Materials Research Society symposium proceedings ; v. 315
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3.

図書
図書
3. Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
出版情報: Pittsburgh, Pa. : Materials Research Society, c1988
シリーズ名: Materials Research Society symposia proceedings ; v. 101
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