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Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.

フォーマット:
図書
責任表示:
editors: S.V. Babu ... [et al.]
言語:
英語
出版情報:
Warrendale, PA : Materials Research Society, c2000
形態:
ix, 281 p. ; 24 cm
著者名:
Babu, S.V.  
シリーズ名:
Materials Research Society symposium proceedings ; v. 566 <BA00013775>
書誌ID:
BA46033861
ISBN:
9781558994737 [1558994734]  CiNii Books  Webcat Plus  Google Books
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