Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
- フォーマット:
- 図書
- 責任表示:
- editors, Richard B. Fair, Charles W. Pearce, Jack Washburn
- 言語:
- 英語
- 出版情報:
- Pittsburgh, Pa. : Materials Research Society, c1985
- 形態:
- xiii, 284 p. : ill. ; 24 cm
- 著者名:
- シリーズ名:
- Materials Research Society symposia proceedings ; v. 36 <BA00013775>
- 書誌ID:
- BA03262776
- ISBN:
- 9780931837012 [0931837014]
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