Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.

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Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.

フォーマット:

図書

責任表示:

editors, George K. Celler, Juan R. Maldonado

言語:

英語

出版情報:

Pittsburgh, Pa. : Materials Research Society, 1993

形態:

xi, 291 p. : ill. ; 24 cm

著者名:

シリーズ名:

Materials Research Society symposium proceedings ; v. 306 <BA00013775>

書誌ID:

BA21386704

ISBN:

9781558992023 [1558992022]

子書誌情報

所蔵情報

タイトルが類似している資料

詳細

主題:	X-ray lithography--Congresses
分類・件名:	LCC : TK7874 DDC : 621.3815/31 LCSH : X-ray lithography -- Congresses
LCCN:	93034352
注記:	Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993 Includes bibliographical references and indexes
TTLL:	eng

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