Introduction to semiconductor manufacturing technology. 2nd ed
- フォーマット:
- 図書
- 責任表示:
- Hong Xiao
- 言語:
- 英語
- 出版情報:
- Bellingham, Wash. : SPIE, c2012
- 形態:
- xxx, 664 p. : ill. ; 26 cm
- 著者名:
- Xiao, Hong
- 書誌ID:
- BB17747985
- ISBN:
- 9780819490926 [081949092X]
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