Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

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Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

フォーマット:

図書

責任表示:

edited by G.M. Crean, R. Stuck, and J.A. Woollam

言語:

英語

出版情報:

Amsterdam : North-Holland, 1993

形態:

xiv, 338 p. : ill. ; 29 cm

著者名:

シリーズ名:

European Materials Research Society symposia proceedings ; 34 <BA07004036>

書誌ID:

BA20463173

ISBN:

9780444899088 [0444899081]

子書誌情報

所蔵情報

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詳細

主題:	電子工学
LCCN:	93155906
TTLL:	eng

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