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CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

フォーマット:
図書
責任表示:
editors, Tsu-Jae King ... [et al.]
言語:
英語
出版情報:
Warrendale, Pa. : Materials Research Society, c2003
形態:
xi, 308 p. : ill. ; 24 cm
著者名:
シリーズ名:
Materials Research Society symposium proceedings ; v. 765 <BA00013775>
書誌ID:
BA64331431
ISBN:
9781558997028 [1558997024]  CiNii Books  Webcat Plus  Google Books
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