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Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.

フォーマット:
図書
責任表示:
editors, Nichoals E.B. Cowern ... [et al.]
言語:
英語
出版情報:
Warrendale, Pa. : Materials Research Society, c1998
形態:
xi, 228 p. ; 24 cm
著者名:
Cowern, Nicholas E. B.  
シリーズ名:
Materials Research Society symposium proceedings ; v. 532 <BA00013775>
書誌ID:
BA38704167
ISBN:
9781558994386 [1558994386]  CiNii Books  Webcat Plus  Google Books
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