Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

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Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

フォーマット:

図書

責任表示:

editors, Duane S. Boning ... [et al.]

言語:

英語

出版情報:

Warrendale, Pa. : Materials Research Society, c2004

形態:

xi, 292 p. : ill. ; 24 cm

著者名:

シリーズ名:

Materials Research Society symposium proceedings ; v. 816 <BA00013775>

書誌ID:

BA69082866

ISBN:

9781558997660 [1558997660]

子書誌情報

所蔵情報

タイトルが類似している資料

詳細

主題:	工業基礎学
注記:	Includes bibliographical references and indexes
TTLL:	eng

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