Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

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Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

フォーマット:

図書

責任表示:

editors, Arturo A. Ayón ... [et al.]

言語:

英語

出版情報:

Warrendale, Pa. : Materials Research Society, c2002

形態:

xi, 318 p. : ill ; 24 cm

著者名:

シリーズ名:

Materials Research Society symposium proceedings ; v. 687 <BA00013775>

書誌ID:

BA57659263

ISBN:

9781558996236 [1558996230]

子書誌情報

所蔵情報

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詳細

その他の標題:	Materials science of microelectromechanical systems (MEMS) devices 4 Materials science of microelectromechanical systems (MEMS) devices four
主題:	工業基礎学
注記:	Includes bibliographical references and indexes
TTLL:	eng

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