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Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

フォーマット:
図書
責任表示:
edited by Orlando Auciello and Jürgen Engemann
言語:
英語
出版情報:
Dordrecht ; Boston : Kluwer, c1993
形態:
xv, 633 p. : ill. ; 25 cm
著者名:
シリーズ名:
NATO ASI series ; ser. E . Applied sciences ; v. 234 <BA05093589>
書誌ID:
BA20386017
ISBN:
9780792322658 [0792322657]  CiNii Books  Webcat Plus  Google Books
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